Water oxidation is a key half reaction in the energy conversion scheme. The reaction mechanism for the oxidation of H2O to O2 catalyzed by single-Ru-substituted polyoxometalates, [RuIII(H2O)XW11O39]n− (X = SiIV, GeIV), was investigated by means of density functional calculations. The electronic structure of the pre-activation intermediates indicates that the aqua ligand is prone to accommodate the proton coupled electron transfer (PCET) process to achieve the active group [RuV
Oa], and the high valent oxo-ruthenium(V) species are responsible for the O–O forming event. Three possible proton acceptors were designed for the rate-determining step (Ob, Oa, and H2O), the calculated results support that the bridge Ob atom of the polytungstate ligand will act as the most favorable proton acceptor in the O–O bond formation, with an energy barrier of 28.43 kcal mol−1. A detailed information of the peroxidic intermediates in the oxidation process was also characterized, both the peroxo-species [RuIV(OO)SiW11O39]6− and [RuV(OO)SiW11O39]5− show the six-coordinate isomer with an open terminal geometry is more favorable than the close seven-coordinate ones. In addition, the replacement of the heteroatom in XO4n− can effectively tune the catalytic activity of polyoxometalates, in the order of GeIV > SiIV.