Silicon nanowires (SiNWs) have been widely used in the new generation of nanocircuits. In order to establish efficient and reliable fabrication procedures of one-dimensional nanowire devices, controllable assembly of SiNWs is a key challenge. Although various methods have been reported to assemble SiNWs, they brought unexpected problems, such as low efficiency, chemical contamination or high-cost. Here, we demonstrate a mechano-sliding strategy to directly transfer chemical vapor deposition (CVD) grown SiNWs in a solvent-free, fluid-free, and lubricant-free manner with a highly simplified operation. The distribution density of the transferred SiNWs can be controlled by pressure, so that single- or multi-nanowire FET devices for high-sensitivity biological detection or high-density arrays can be obtained. The fabricated device exhibited excellent surface charge response characteristics and chemical modification versatility. These advances pave the way for a feasible, efficient and low-cost approach to fabricate SiNW-based biosensors as a general and powerful platform for chemical detection and biological detection.