Electrically charged selectivity of poly-para-xylylene deposition†
Chih-Yu Wu,Ho-Yi Sun,Wei-Chieh Liang,Hung-Lun Hsu,Hsin-Ying Ho,Yu-Ming Chen,Hsien-Yeh Chen
Chemical Communications Pub Date : 01/12/2016 00:00:00 , DOI:10.1039/C5CC08059B
Abstract

The bottom-up patterning approach provides intrinsic advantages associated with unlimited resolution but is limited by the materials available for selection. A general and simple approach towards the selective deposition of poly-para-xylylenes is introduced in this communication. The chemical vapour deposition (CVD) of poly-para-xylylenes is inhibited on the high-energy surfaces of electrically charged conducting substrates. This technology provides an approach to selectively deposit poly-para-xylylenes irrespective of the substituted functionality and to pattern these polymer thin films from the bottom up.

Graphical abstract: Electrically charged selectivity of poly-para-xylylene deposition