Silicon nanowires (SiNWs) were synthesized by means of a Vapor–Liquid–Solid (VLS) procedure using Au as a catalyst in a UHV-CVD system. The growth of the SiNWs was critically dependent on the flow rate of H2. In our system, the nanowires showed novel features such as faceting phenomenon and the migration of Au atoms on the lateral surface, which were dependent on the flow rate of H2. In particular, Au that diffused from the catalyst tip to the facet edge was transformed into Au clusters, resulting in the formation of numerous Au stripes that entirely surrounded the pillar during the growth process. A one step synthesis of branched SiNWs can be achieved via the presence of Au clusters at the lateral surface under conditions of a high flow rate of H2. The growth kinetics of SiNWs as a function of H2 flow rate lead to the conclusion that the influence of the effect of hydrogen is a major factor in controlling the growth of SiNWs under conditions of a low partial pressure of silane.
