Direct patterning of sol–gel metal oxide semiconductor and dielectric films via selective surface wetting†
Sujin Sung,Sungjun Park,Seungbok Cha,Won-June Lee
RSC Advances Pub Date : 04/27/2015 00:00:00 , DOI:10.1039/C5RA04515K
Abstract

We report the simple, photolithography-free, direct patterning of both solution-processed metal oxide semiconductors and dielectrics via selective surface wetting. This technique was directly applied to fabrication of low-voltage all-solution metal oxide thin-film transistors with minimal channel and gate leakage currents.

Graphical abstract: Direct patterning of sol–gel metal oxide semiconductor and dielectric films via selective surface wetting