Periodic one (1D) and two dimensional (2D) arrays of copper(II) oxide (CuO) islands were successfully created by simple heat treatment of spin-coated copper acetate–polyvinyl alcohol (PVA) composites on 1D and 2D surface relief grating (SRG) templates using photodynamic polymers. Formation of CuO islands can be explained as the successive collapse phenomenon of the grating (or groove) of the SRG template used. A scanning electron microscopy study reveals that the combination of a photodynamic polymer and copper acetate–PVA based on pyrolyzing led to directed self-assembly of metal oxide to form the arrays of CuO islands.