Nanostructured silicon surfaces via nanoporous alumina
Matthias Kruse,Steffen Franzka,Günter Schmid
Chemical Communications Pub Date : 05/13/2003 00:00:00 , DOI:10.1039/B301340E
Abstract
Nanostructured silicon surfaces are generated using nanoporous alumina membranes as stamps to imprint PMMA films on silicon, followed by reactive ion etching (RIE).
