An efficient Pd-catalyzed cleavage of the Me–Si bond in ortho-trimethylsilyl aryltriflates was realized and synthetically applied. Most of the commercially available ortho-trimethylsilyl aryltriflates could undergo the Pd-catalyzed intermolecular coupling with alkynes via cleavage of the Me–Si bond, which represents a new reaction pattern of ortho-trimethylsilyl aryltriflates. Potassium bromide (KBr) was found effective for this process. A variety of benzosilole derivatives were thus generated in high yields.