Thin films of Ba_0.95Sr_0.05(Fe_0.5Nb_0.5)O₃ ceramic on ITO-coated glass substrate were prepared by pulsed laser deposition technique. Deposited films were annealed at 500 °C for 1 h in vacuum. Structural, dielectric and optical properties were studied at different substrate temperature. Thin films were analyzed using low angle X-ray diffraction. All thin films have a single-phase perovskite structure. AFM analysis showed the uniform and nanosize grains in all samples. At room temperature, high dielectric constant (∼4037) with low dielectric loss (0.04) was obtained at 1 kHz frequency. The optical band gap was found to be 2.60 eV for 550 °C deposited film.