Abstract A barium strontium titanate Ba0.65Sr0.35TiO3 and its lithium (Li) and copper (Cu) doped thin films have fabricated on quartz substrates based on sol-gel and spin-coating method. Chemical solution deposition with spin-coating technique deposited the thin films. The addition of Li and Cu dopants lead to the change of lattice constant and the change of grain size. From Scherrer’s equation, it found that BLST and BCST thin films have larger and smaller grain size than that of BST, respectively. It also revealed that the crystal structures formed in a phase between cubic and tetragonal structure. Scanning electron microscopy was confirmed homogenous surfaces of thin film and energy dispersive x-ray was showed chemical composition according to the considered stoichiometry.