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Analysis of the n-GaN electrochemical etching process and its mechanism in oxalic acid
Artem Shushanian,Daisuke Iida,Zhe Zhuang,Yu Han,Kazuhiro Ohkawa
RSC Advances Pub Date : 02/07/2022 00:00:00 , DOI:10.1039/D1RA07992A
Abstract

We studied the wet electrochemical etching of n-GaN films in oxalic acid. The electrooxidation processes occur in a potentiostatic mode in the voltage range of 5 to 20 V. We described the formation of the porous n-GaN layer structures in several ways. Firstly, we observed the microphotographs of the cross section to characterize the nanostructure. Secondly, we examined the reaction products in a liquid phase using ICP-OES and TOC-TN methods, while vapor-phase products were examined by gas chromatography. Finally, according to the product data analysis, we demonstrate a mechanism for the electrochemical oxidation of n-GaN in oxalic acid, which involves 6 electrons.

Graphical abstract: Analysis of the n-GaN electrochemical etching process and its mechanism in oxalic acid
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