The reactions of trifluoromethyl radicals with silane, trimethylsilane and tetramethylsilane have been studied in the gas phase. Arrhenius parameters (based on a value of 10^13.36 mol^–1 cm³ s^–1 for the velocity constant for the combination of trifluoromethyl radicals) have been measured or estimated for the following reactions: [graphic ommitted].