Electronic Materials Letters ( IF 3.151 ) Pub Date : 2022-12-30 , DOI:
10.1007/s13391-022-00398-w
ChanGyuPark,JeongWooYang,NongMoonHwang
AbstractIn this work, initial stage of diamond growth at 300℃ by hot filament chemical vapor deposition (HFCVD) was studied using a single layer graphene membrane for transmission electron microscopy (TEM) observations. The graphene membrane was exposed to a temperature of 300℃, 60 mm below the hot filament, for 1 s, 10 s, 30 s, 120 s, and 30 min at 20 Torr with a gas mixture of 1% CH4–99% H2. Under this condition, only the gas phase is stable at 300℃. As the exposure time increases, the average size of nanocarbon particles also increases. The growth of nanoparticles at 300℃, where only the gas phase is stable, indicates that the growth occurred by non-classical crystallization, where the building blocks are nanoparticles. At 1 and 10 s, only i-carbon nanoparticles were captured, whereas the hexagonal diamond and n-diamond ones were additionally captured at 30 and 120 s. A cubic diamond nanoparticle was captured only at 30 min. The structural stability of nanocarbon changes depending on the size, in the order of amorphous, i-carbon, hexagonal diamond, n-diamond, and cubic diamond, as the size increases. Observed n-diamond nanoparticles have a core-shell structure surrounded by an i-carbon layer. I-carbon nanoparticles larger than ~ 10 nm had a polycrystalline structure, whereas hexagonal diamond and n-diamond nanoparticles had a single crystal structure. A lattice of the i-carbon layer in contact with n-diamond nanoparticles was partially oriented in the same direction as that of the n-diamond nanoparticles.Graphical abstract