A new route for fabricating polymer optical microcavities†
Zhang Zhang,Ni Yao,Jing Pan,Lei Zhang,Wei Fang,Limin Tong
Nanoscale Pub Date : 03/04/2019 00:00:00 , DOI:10.1039/C8NR10007A
Abstract

By using a self-assembly method, SU-8 whispering gallery mode optical microcavities with an ultra-smooth surface (σ < 0.6 nm) and high-Q factors (∼104) are fabricated. As an application of the microcavities, we demonstrate a polydimethylsiloxane packaged temperature sensor with high sensitivity (120 pm per °C) and long-term stability (over one year). These results illustrate broad application potential in ultrasensitive sensors and microlasers.

Graphical abstract: A new route for fabricating polymer optical microcavities