The reaction between amino-functionalized polyhedral oligomeric silsesquioxanes (POSS-NH₂) and graphene oxide (GO) sheets was used to graft POSS-NH₂ onto a GO layer immobilized onto a layer of (3-aminopropyl)triethoxysilane, self-assembled onto Si substrate. The chemical composition and surface morphology as well as the surface properties of the prepared films were investigated by means of Fourier transform infrared spectroscopy, water contact angle measurements and field emission electron microscopy. Tribological measurements performed with a nanoindenter showed that such hydrophobic trilayer film exhibited a reduced friction coefficient suitable for applications in lubricant coatings.